| CAS No.: | 75-73-0 |
|---|---|
| Formula: | CF4 |
| EINECS: | 200-896-5 |
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Carbon tetrafluorideis a cryogenic refrigerant that is relatively inert under normal conditions, an oxygen displacer, and is also used in various wafer etching processes. CF4 is currently the most widely used plasma etching gas in the microelectronics industry. It can be widely used in the etching of thin film materials such as silicon, silicon dioxide, silicon nitride, phosphosilicate glass and tungsten, and in surface cleaning of electronic devices and solar cells. It is also widely used in the production of laser technology, gas phase insulation, low-temperature refrigeration, leak detection agents, controlling the attitude of space rockets, and decontamination agents in printed circuit production.
Due to the chemical stability of carbon tetrafluoride, carbon tetrafluoride can be used in metal smelting and plastic industries
| Specifications | Company Standard |
| CF4 | ≥ 99.999% |
| O2+AR | ≤ 1 ppm |
| N2 | ≤ 2 ppm |
| H2 | ≤ 0.3 ppm |
| CO | ≤ 0.3 ppm |
| CO2 | ≤ 0.3 ppm |
| SF6 | ≤ 0.3 ppm |
| THC | ≤ 0.3 ppm |
| OFC | ≤ 1 ppm |
| Moisture | ≤ 1 ppm |
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Product Information
FAQ
1.What's your product price?
As each gas price depends on market supply and demand, quantity and purity, it is difficult to give a fixed price. If you have any interest in each gas, please give us your details and we will make an offer for you.
2.What's the min order?
Different products have different min orders. Please do not hesitate to let me know your request.
3.What's the delivery time?
If the cylinder is in stock and only needs to be filled with gas, delivery is approximately 7-10 days after receipt of the deposit.
If the cylinder needs to be custom made, delivery is approximately 15-35 days after the deposit is received.That depends on the quantity.
4.How to check the gas quality?
Firstly, our cylinder will take treatment (cleaning, drying, vacuum pumping, and replacement before filling gas. In this way the inside of the cylinder is clear and dry. Secondly, we will perform tests on each of the treated cylinders to assure their internal purity. Thirdly, we will test all the gas after it has been filled into the cylinder. If the gas tested is not up to standard, we will produce it again without releasing the faulty product for ex-work. Finally, we will supply you with a qualified report on the gas test.
5.All the cylinders can be recycled?
Usually seamless steel cylinders can be recycled for use within 20 years.
The disposable cylinder is intended for one use only.
6.Shall we send back the cylinders to China to refill gas again?
Yes, when you order our cylinders, next time, you can send the cylinders back to be filled again.You just have to tell us before you export.We will take care of all customs clearance procedures for imports.
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