Formula: | He |
---|---|
Constituent: | Industrial Pure Air |
Grade Standard: | Industrial Grade |
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Inspection item | unit | Purity |
helium | % | 99.999 |
O2 | ppmv | ≤1.0 |
N2 | ppmv | ≤2.0 |
CO2 | ppmv | ≤0.5 |
CO | ppmv | ≤0.5 |
CO2+CO | ppmv | |
CH4 | ppmv | ≤0.5 |
Water | ppmv | ≤3.0 |
H2 | ppmv | ≤1.0 |
Ne | ppmv | ≤4.0 |