Formula: | He |
---|---|
Constituent: | Industrial Pure Air |
Grade Standard: | Industrial Grade |
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Specification:
Specification | Company Standard |
He | ≥ 99.999% |
N2 | ≤ 2.0 ppm |
O2+AR | ≤ 1.0 ppm |
H2 | ≤ 1.0 ppm |
CO | ≤ 0.5 ppm |
CO2 | ≤ 0.5 ppm |
Ne | ≤ 1.0 ppm |
CH4 | ≤ 0.5 ppm |
Moisture | ≤ 0.5 ppm |